JPH053895B2 - - Google Patents

Info

Publication number
JPH053895B2
JPH053895B2 JP60032228A JP3222885A JPH053895B2 JP H053895 B2 JPH053895 B2 JP H053895B2 JP 60032228 A JP60032228 A JP 60032228A JP 3222885 A JP3222885 A JP 3222885A JP H053895 B2 JPH053895 B2 JP H053895B2
Authority
JP
Japan
Prior art keywords
plane
thin film
line
tin oxide
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60032228A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61191954A (ja
Inventor
Takeshi Matsumoto
Osamu Okada
Juji Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Gas Co Ltd
Original Assignee
Osaka Gas Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Gas Co Ltd filed Critical Osaka Gas Co Ltd
Priority to JP60032228A priority Critical patent/JPS61191954A/ja
Priority to GB08624904A priority patent/GB2182448B/en
Priority to PCT/JP1986/000077 priority patent/WO1986004989A1/ja
Priority to KR1019860700721A priority patent/KR940002511B1/ko
Publication of JPS61191954A publication Critical patent/JPS61191954A/ja
Priority to GB868625006A priority patent/GB8625006D0/en
Publication of JPH053895B2 publication Critical patent/JPH053895B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP60032228A 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子 Granted JPS61191954A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60032228A JPS61191954A (ja) 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子
GB08624904A GB2182448B (en) 1985-02-20 1986-02-19 Tin oxide thin film gas sensor component
PCT/JP1986/000077 WO1986004989A1 (en) 1985-02-20 1986-02-19 Gas sensor element of tin oxide film
KR1019860700721A KR940002511B1 (ko) 1985-02-20 1986-02-19 산화주석 박막 가스 센서 소자
GB868625006A GB8625006D0 (en) 1985-02-20 1986-10-18 Gas sensor element of tin oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60032228A JPS61191954A (ja) 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子

Publications (2)

Publication Number Publication Date
JPS61191954A JPS61191954A (ja) 1986-08-26
JPH053895B2 true JPH053895B2 (en]) 1993-01-18

Family

ID=12353109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60032228A Granted JPS61191954A (ja) 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子

Country Status (4)

Country Link
JP (1) JPS61191954A (en])
KR (1) KR940002511B1 (en])
GB (2) GB2182448B (en])
WO (1) WO1986004989A1 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10383177B2 (en) 2013-09-19 2019-08-13 Robert Bosch Gmbh Micro heating plate device and sensor having a micro heating plate device

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643978B2 (ja) * 1986-06-27 1994-06-08 大阪瓦斯株式会社 ガスセンサ及びその製造方法
GB9512929D0 (en) * 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US6134944A (en) * 1999-04-29 2000-10-24 The Regents Of The University Of California System and method for preconcentrating, identifying, and quantifying chemical and biological substances
JP5350593B2 (ja) 2007-01-15 2013-11-27 キャタピラー エス エー アール エル パネルの製造方法
CN104568002B (zh) * 2014-12-26 2017-05-03 昆山工研院新型平板显示技术中心有限公司 环境检测装置
CN107315033B (zh) 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN107315034B (zh) 2016-04-26 2021-06-08 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN106092200A (zh) * 2016-07-08 2016-11-09 南京信息工程大学 一种环境检测装置
WO2018123674A1 (ja) 2016-12-28 2018-07-05 パナソニックＩｐマネジメント株式会社 気体検出装置、気体センサシステム、燃料電池自動車、及び水素検出方法
CN110114662B (zh) 2016-12-28 2022-03-18 新唐科技日本株式会社 气体检测装置、气体检测系统、燃料电池汽车及气体检测方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424094A (en) * 1977-07-26 1979-02-23 Fuji Electric Co Ltd Production of gas detecting element
JPS5811844A (ja) * 1981-07-15 1983-01-22 Matsushita Electric Ind Co Ltd Ｎｏ↓２ガス検知器及び検知方法
JPS5983046A (ja) * 1982-11-02 1984-05-14 Hitachi Ltd ガスセンサおよびその製造方法
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10383177B2 (en) 2013-09-19 2019-08-13 Robert Bosch Gmbh Micro heating plate device and sensor having a micro heating plate device

Also Published As

Publication number Publication date
GB2182448A (en) 1987-05-13
GB2182448B (en) 1989-01-11
KR940002511B1 (ko) 1994-03-25
GB8625006D0 (en) 1986-11-19
GB8624904D0 (en) 1986-11-19
WO1986004989A1 (en) 1986-08-28
KR880700261A (ko) 1988-02-22
JPS61191954A (ja) 1986-08-26

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